Simon Fraser University

SIMS


- XPS: X-ray Photoelectron Spectroscopy
angle-resolved XPS
ion etching for surface cleaning and depth profiling with XPS
- XPM: X-ray Photoelectron Microscopy
- AES: Auger Electron Spectrometry
- SAM: Scanning Auger Microscopy
- SEM: Scanning Electron Microscopy
- ISS: Ion Scattering Spectroscopy
- SIMS: Secondary Ion Mass Spectrometry
- heating and cooling stage (-160 – 600 ?C)


Tool Status Up
Manufacturer Kratos Analytical
Model Axis Ultra DLD
Typical Application Advanced surface analysis
Location 6140
Contact Information

Training

Dennis Hsiao hsiao@4dlabs.ca