Simon Fraser University

Mask Aligner 1


- sub-micron features with vacuum contact
- interchangeable deep UV (254 nm) and near UV (365 nm) optics
- 4-camera front and back-side alignmentprocessing for small pieces, 50 and 100 mm wafers
- configured for 75, 100, and 125 mm masks


Tool Status Up
Manufacturer OAI
Model MBA 800
Typical Application Optical lithography
Location 6060.11
Related Documents
Contact Information

Training

Grace Li li@4dlabs.ca