Simon Fraser University

Mask Aligner 2

- processing for small pieces, 50, 100, and 150 mm wafers

- near UV (365 nm) LED light source and optics

- automatic alignment capabilities with front and back-side alignment

- sub-micron features with vacuum contact

- configured for 125 and 175 mm masks

Tool Status Up
Manufacturer OAI
Model MBA 800
Typical Application Optical lithography
Location 6060.11
Related Documents
Contact Information


Yasong Li