Simon Fraser University

Ellipsometer 1


- fixed angle spectroscopic ellipsometer
- wavelength range: 190-850 nm
- built- in light source and associated device control
- wavelength resolution: better than 2 nm
- advanced modelling capabilities


Tool Status Up
Manufacturer Horiba
Model MM-16
Typical Application Film thickness
Location 6060.2
Related Documents
Contact Information

Training

Grace Li li@4dlabs.ca