Simon Fraser University

SEM 1 - Helios (FIB mode)

Tomahawk ion column; 0.5 to 30 kV; 4 nm ion beam image resolution at 30 kV;

Elstar Schottky thermal field emitter with UC technology (monochromator); 0.35 to 30 kV; Electrostatic scanning; Beam deceleration with stage bias from -50 V to -4 kV;

0.8 nm image resolution at 1 kV; 0.7 nm image resolution at 15 kV;

Integrated plasma cleaner; Liquid nitrogen cold trap for improving vacuum;

SED, in-lens (TLD), Ion Conversion and Electron (ICE), and EDX detectors;

Retractable STEM (0.6 nm image resolution) and vCD (BSE) detectors;

High precision 5-axes motorized stage; Nav-Cam photo for sample navigation;

Gas injection systems (GIS) for Pt deposition and carbon milling;

Quorum cryo system with Pt sputtering capability for biological samples, solutions, or other soft materials;

AutoTEM software and Easylift probe for TEM sample preparation; AutoSlice and View software for 3D reconstruction.

Tool Status Up
Manufacturer FEI
Model Helios
Location 6120.5
Contact Information


Xin Zhang