Simon Fraser University

SEM 4 - DB235 (FIB mode)


Description of Capabilities

  • 0.2 - 30 keV field emission gun
  • Focused Ion Beam (FIB)
  • X-ray detector (EDS) (EDAX, Be detectable)
  • SEM Resolution 3 nm (5 keV)
  • Backscattered Electron Detector  (in lens)
  • Automatic TEM cross-sectioning capabilities
  • organometallic Pt source
  • Fixed probe for electrical measurements

Tool Status Down
Manufacturer FEI
Model Dualbeam 235
Location 6140.2
Contact Information