Simon Fraser University

Plasma Stripper 1


- parallel plate design
- resist stripping or ashing with O2 (Ar gas also available)
- 450 W reactors
- processing for small pieces, 50 and 100 mm wafers


Tool Status Up
Manufacturer Technics
Model PEII-A
Typical Application Photoresist ashing
Location 6060.5
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Contact Information

Training

Grace Li li@4dlabs.ca