Simon Fraser University

Profilometer_Decomissioned


- analysis of nano- to micron-scale thicknesses
- sample stage with x and y control
- vacuum available for chuck
- tip diameter = 2 um
- vertical resolution < 5 nm


Tool Status Down
Manufacturer Tencor
Model P-10
Typical Application Film step measurement
Location 6060.2
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Contact Information

Training

Chris Balicki balicki@4dlabs.ca