Simon Fraser University

PVD 1


Thermal: 2 sources available, currently not occupied.

E-beam: Ni, Cr, Al, Ti

RF Sputter: Al2O3

DC Sputter: Ni, Al, Al/Si, Cr, Ti

- sources: 2 thermal, 4 e-beam, 2 DC sputter (1 source for ferromagnetic materials), 2 RF sputter
- 5E-7 Torr base pressure
- processing for small pieces, 50 and 100 mm wafers


Tool Status Up
Manufacturer Bestec
Typical Application Metal deposition
Location 6060.8
Related Documents
Contact Information

Training

Chris Balicki balicki@4dlabs.ca