Simon Fraser University

PVD 2_Decomissioned


Thermal: Au, Cr, Ge, Ge-Au, Ni

- sources: 4 thermal
- 2E-7 Torr base pressure
- processing for small pieces and 50 mm wafers


Tool Status Down
Manufacturer Kurt J. Lesker
Typical Application Metal deposition
Location 6060.8
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Contact Information

Training

Chris Balicki balicki@4dlabs.ca