Simon Fraser University

PVD 3


Thermal: Cr

E-beam: Ti, Au, Pt, Pd

- sources: 1 thermal, 4 e-beam
- 5E-7 Torr base pressure
- processing for small pieces, 50 mm, 100 mm, and 150 mm wafers


Tool Status Up
Manufacturer Kurt J. Lesker
Model PVD75
Typical Application Metal deposition
Location 6060.8
Related Documents
Contact Information

Training

Chris Balicki balicki@4dlabs.ca