PVD 6
Sputter: ZnO, Cr, ITO, Nb2O5
- sources: 3 sputter, DC and RF
- 5E-7 Torr base pressure
- processing for small pieces, 50 mm, 100 mm, and 150 mm wafers
| Tool Status | Up | ||
|---|---|---|---|
| Manufacturer | Kurt J. Lesker | ||
| Model | PVD75 | ||
| Typical Application | Oxide deposition | ||
| Location | 6060.10 | ||
| Contact Information |
Training
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