Simon Fraser University

PVD 8


Sputter: Ni

- sources: 3 sputter RF
- 5E-7 Torr base pressure
- processing for small pieces, 50 mm, 100 mm, and 150 mm wafers


Tool Status Up
Manufacturer Kurt J. Lesker
Model PVD75
Typical Application Ni sputter
Location 6060.10
Contact Information

Training

Chris Balicki balicki@4dlabs.ca