Simon Fraser University

Spin Coaters


- programmable spin speeds, temperatures, and ramp rates
- edge bead removal available
- aluminum hot plate surface for uniform heating
- dedicated spin coaters and hot plates for PMMA and MiR 703
- spin speeds up to 6000 rpm
- processing for small pieces, 50 and 100 mm wafers


Tool Status Up
Location 6060.7
Related Documents
Contact Information

Training

Grace Li li@4dlabs.ca