Simon Fraser University

Tube Furnace 4 - poly-Si


Doped and undoped polysilicon LPCVD
Processing for 50 and 100 mm wafers


Tool Status Up
Manufacturer Tystar
Typical Application Nitride and polysilicon deposition
Location 6060.4
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Contact Information

Training

Hadi Esmaeilsabzali hesmaeil@sfu.ca