Resources
4 Point Probe Meter |
Status: Up
|
Available for use. |
Atomic Force Microscope |
Status: Up
|
Available for use. |
Atomic Layer Deposition |
Status: Up
|
Available. |
Atomic Layer Deposition: After Hours |
Status: Up
|
Available. |
Carbon Evaporator |
Status: Down
|
4D LABS Support Ended |
Clean Room |
Status: Up
|
Available for use. |
Contact Angle Goniometer |
Status: Up
|
Available for use. |
Critical Point Dryer |
Status: Up
|
Available for use. |
Cryo Microtome |
Status: Up
|
Available for use. |
CSM Modelling Computer |
Status: Up
|
Available for use. |
CSM Technician |
Status: Up
|
Available for use. |
CSM Training |
Status: Up
|
Available for use. |
Deep Reactive Ion Etcher |
Status: Up
|
Available for use. |
Developer Station |
Status: Up
|
Available for use. |
Dicing Saw |
Status: Up
|
Available for use. |
Differential Scanning Calorimeter |
Status: Up
|
|
Electron Beam Lithography 1 |
Status: Up
|
Available for use. |
Electron Beam Lithography 2 |
Status: Up
|
|
Ellipsometer 1 |
Status: Up
|
Available for use. |
Ellipsometer 2 |
Status: Down
|
Currently not functioning. Previously restricted to 260 - 870 nm or 1.43 - 4.77 eV. |
Epoxy Embedding System |
Status: Up
|
|
Fuel Cell Test Station 1 |
Status: Down
|
Room renos in progress |
Fuel Cell Test Station 2 |
Status: Down
|
Room renos in progress |
Fuel Cell Test Station 3 |
Status: Down
|
Room renos in progress |
Fuel Cell Test Station 4 |
Status: Down
|
Room renos in progress |
Glovebox PVD System |
Status: Down
|
Down due to chiller failure |
Glovebox System |
Status: Down
|
Ongoing re-location due to maintenance. |
Grinder/Polisher |
Status: Up
|
|
Helium Ion Microscope |
Status: Down
|
|
High-Temperature Furnace |
Status: Up
|
Available for use. |
Hot Plates |
Status: Up
|
Available for use. |
Hot Press |
Status: Down
|
Repairing leaking seals. |
ICPMS |
Status: Up
|
Available. ICP-MS & LA ICP-MS. |
ICPMS (Laser Ablation mode) |
Status: Down
|
Available for use. |
Ion Miller |
Status: Down
|
4D LABS Support Ended |
Laser Micromachining |
Status: Up
|
Available for use. |
Laser Scriber |
Status: Up
|
|
Laser Writer |
Status: Up
|
Available for use. |
Leak Detector |
Status: Up
|
Available for use. |
Mask Aligner 1 |
Status: Up
|
Available for use. |
Mask Aligner 2 |
Status: Up
|
Available for use. |
Mask Aligner_Decomissioned |
Status: Down
|
Moved to Engineering Science. |
Mask Writer |
Status: Up
|
Available for use. |
Microscope 1 |
Status: Up
|
Available for use. |
Microscope 2 |
Status: Up
|
Available for use. |
Microtome |
Status: Up
|
Available for use. |
Nanofabrication Technician |
Status: Up
|
Available for use. |
Nanofabrication Training |
Status: Up
|
Available for use. |
Nanoimaging Technician |
Status: Up
|
Available |
Nanoimaging Training |
Status: Up
|
Available |
Nanoimprinter |
Status: Up
|
Available for use. |
Particle Size Analyzer |
Status: Up
|
|
PECVD |
Status: Down
|
Available. |
Plasma Cleaner |
Status: Down
|
4D LABS Support Ended |
Plasma Stripper 1 |
Status: Up
|
Available for use. |
Plasma Stripper 2 |
Status: Down
|
4D LABS Support Ended |
Porosimeter |
Status: Down
|
Not working and may not be repairable. |
Probe Station - Clean Room |
Status: Up
|
Available for use. |
Probe Station - Glovebox |
Status: Up
|
SOP writing in progress. |
Profilometer 1 |
Status: Up
|
Available for use. |
Profilometer 2 |
Status: Up
|
Available for use. |
Profilometer_Decomissioned |
Status: Down
|
Moved to Engineering Science. |
PVD 1 |
Status: Up
|
Sputtering is unavailable. Available for evaporation only. |
PVD 2_Decomissioned |
Status: Down
|
Moved to Engineering Science. |
PVD 3 |
Status: Up
|
Available for usage |
PVD 4 |
Status: Up
|
Available for use. |
PVD 5 |
Status: Up
|
Available for usage |
PVD 6 |
Status: Up
|
Source 3 does not work. |
PVD 7 |
Status: Up
|
|
PVD 8 |
Status: Up
|
Available for use. |
PVD 9 |
Status: Up
|
Available for use. |
Rapid Thermal Annealer 1 |
Status: Down
|
Broken quartz part. Replacement on order. |
Rapid Thermal Annealer 2 |
Status: Down
|
System shutdown. |
Reflectometer |
Status: Up
|
Available for use. |
RIE 1 |
Status: Up
|
Available for use. |
RIE 2 |
Status: Up
|
Pump repair in progress. |
Screen Printer |
Status: Up
|
Available for use. |
SEM 1 - Helios |
Status: Up
|
Available |
SEM 1 - Helios (FIB mode) |
Status: Up
|
Available for use. |
SEM 2 - Nova NanoSEM |
Status: Up
|
Available |
SEM 2 - Nova NanoSEM (mountable detector) |
Status: Up
|
Available |
SEM 3 - Explorer |
Status: Up
|
Up |
SEM 4 - DB235 |
Status: Down
|
4D LABS Support Ended |
SEM 4 - DB235 (FIB mode) |
Status: Down
|
4D LABS Support Ended |
SIMS |
Status: Up
|
Available |
Small Angle X-ray Scattering System |
Status: Up
|
Available for use. Humidity stage installed. |
Spin Coaters |
Status: Up
|
Available for use. |
Spin-Rinse-Dryer |
Status: Up
|
Available for use. |
Spray Coater |
Status: Up
|
Available for use. |
Sputter System 1 - Ir/C |
Status: Up
|
|
Sputter System 2 - Au |
Status: Down
|
4D LABS Support Ended |
STEM 1 - Osiris |
Status: Up
|
|
STEM 2 - Tecnai |
Status: Down
|
4D LABS Support Ended |
STEM 3 - Hitachi |
Status: Down
|
4D LABS Support Ended |
Stress Meter |
Status: Up
|
Available for use. |
Technician-Characterization |
Status: Up
|
|
Technician-Fabrication |
Status: Up
|
|
Technician-Student |
Status: Up
|
|
Training-Characterization |
Status: Up
|
|
Training-Fabrication |
Status: Up
|
|
Tube Furnace 1 - SiO2 |
Status: Up
|
Available for use. |
Tube Furnace 2 - Doping |
Status: Up
|
Available for use. |
Tube Furnace 3 - Si3N4/SiNx |
Status: Up
|
Available for use. |
Tube Furnace 4 - poly-Si |
Status: Down
|
Available for use. |
UV-Vis |
Status: Up
|
|
Vacuum Oven 1 |
Status: Up
|
Available for use. |
Vacuum Oven 2 |
Status: Up
|
Available for use. |
Vitrobot |
Status: Up
|
Available for use. |
Wafer Bonder |
Status: Up
|
Available for use. |
Wafer CV Profiler |
Status: Up
|
Available for use. |
Wafer Scriber |
Status: Up
|
Available for use. |
Wet Lab |
Status: Up
|
Available for use. |
Wet Lab 7000 Lvl |
Status: Up
|
Available for use. |
Wetbench #1: Organics |
Status: Up
|
Available for use. |
Wetbench #2: Acids |
Status: Up
|
Available for use. |
Wetbench #3: Developers |
Status: Up
|
Available for use. |
Wetbench #4: KOH/Metal Etch |
Status: Up
|
Available for use. |
Wetbench #5: RCA Clean |
Status: Up
|
Available for use. |
Wetbench #6: Electroplating |
Status: Up
|
Available for use. |
Wetbench #7: Acid Cleaning |
Status: Up
|
Available for use. |
Wetbench #8: General solvent |
Status: Up
|
Available for use. |
Wetbench #9: Nanomaterials and Organics |
Status: Up
|
Available for use. |
Wire Bonder |
Status: Up
|
Available for use. |
XeF2 Etcher |
Status: Up
|
Available for use. |
XPS, AES, ISS, SEM |
Status: Down
|
Available for use. |
XRD 1 |
Status: Down
|
Available |
XRD 2 |
Status: Up
|
Room temperature stage. B-B optics. Silicon strip detector. |