Resources
| 4 Point Probe Meter |
Status: Up
|
Available for use. |
| Atomic Force Microscope |
Status: Up
|
Available for use. |
| Atomic Layer Deposition |
Status: Up
|
Available. |
| Atomic Layer Deposition: After Hours |
Status: Up
|
Available. |
| Carbon Evaporator |
Status: Down
|
4D LABS Support Ended |
| Clean Room |
Status: Up
|
Available for use. |
| Contact Angle Goniometer |
Status: Up
|
Available for use. |
| Critical Point Dryer |
Status: Up
|
Available for use. |
| Cryo Microtome |
Status: Up
|
Available for use. |
| CSM Modelling Computer |
Status: Up
|
Available for use. |
| CSM Technician |
Status: Up
|
Available for use. |
| CSM Training |
Status: Up
|
Available for use. |
| Deep Reactive Ion Etcher |
Status: Up
|
Available for use. |
| Developer Station |
Status: Up
|
Available for use. |
| Dicing Saw |
Status: Up
|
Available for use. |
| Differential Scanning Calorimeter |
Status: Up
|
|
| Electron Beam Lithography 1 |
Status: Down
|
Available for use. |
| Electron Beam Lithography 2 |
Status: Up
|
|
| Ellipsometer 1 |
Status: Up
|
Available for use. |
| Ellipsometer 2 |
Status: Down
|
Currently not functioning. Previously restricted to 260 - 870 nm or 1.43 - 4.77 eV. |
| Epoxy Embedding System |
Status: Up
|
|
| Fuel Cell Test Station 1 |
Status: Up
|
Available for use. |
| Fuel Cell Test Station 2 |
Status: Up
|
Available for use. |
| Fuel Cell Test Station 3 |
Status: Up
|
Available for use. |
| Fuel Cell Test Station 4 |
Status: Up
|
Available for use. |
| Glovebox PVD System |
Status: Down
|
Down due to chiller failure |
| Glovebox System |
Status: Up
|
Available for usage |
| Grinder/Polisher |
Status: Up
|
|
| Helium Ion Microscope |
Status: Up
|
|
| High-Temperature Furnace |
Status: Up
|
Available for use. |
| Hot Plates |
Status: Up
|
Available for use. |
| Hot Press |
Status: Down
|
Repairing leaking seals. |
| ICPMS |
Status: Up
|
Available. ICP-MS & LA ICP-MS. |
| ICPMS (Laser Ablation mode) |
Status: Down
|
Available for use. |
| Ion Miller |
Status: Down
|
4D LABS Support Ended |
| Laser Micromachining |
Status: Up
|
Available for use. |
| Laser Scriber |
Status: Up
|
|
| Laser Writer |
Status: Up
|
Available for use. |
| Leak Detector |
Status: Up
|
Available for use. |
| Mask Aligner 1 |
Status: Up
|
Available for use. |
| Mask Aligner 2 |
Status: Up
|
Available for use. |
| Mask Aligner_Decomissioned |
Status: Down
|
Moved to Engineering Science. |
| Mask Writer |
Status: Up
|
Available for use. |
| Microscope 1 |
Status: Up
|
Available for use. |
| Microscope 2 |
Status: Up
|
Available for use. |
| Microtome |
Status: Up
|
Available for use. |
| Nanofabrication Technician |
Status: Up
|
Available for use. |
| Nanofabrication Training |
Status: Up
|
Available for use. |
| Nanoimaging Technician |
Status: Up
|
Available |
| Nanoimaging Training |
Status: Up
|
Available |
| Nanoimprinter |
Status: Up
|
Available for use. |
| Particle Size Analyzer |
Status: Up
|
|
| PECVD |
Status: Down
|
Available. |
| Plasma Cleaner |
Status: Down
|
4D LABS Support Ended |
| Plasma Stripper 1 |
Status: Up
|
Available for use. |
| Plasma Stripper 2 |
Status: Down
|
4D LABS Support Ended |
| Porosimeter |
Status: Down
|
Not working and may not be repairable. |
| Probe Station - Clean Room |
Status: Up
|
Available for use. |
| Probe Station - Glovebox |
Status: Up
|
SOP writing in progress. |
| Profilometer 1 |
Status: Up
|
Available for use. |
| Profilometer 2 |
Status: Up
|
Available for use. |
| Profilometer_Decomissioned |
Status: Down
|
Moved to Engineering Science. |
| PVD 1 |
Status: Up
|
Sputtering is unavailable. Available for evaporation only. |
| PVD 2_Decomissioned |
Status: Down
|
Moved to Engineering Science. |
| PVD 3 |
Status: Down
|
Down for E-beam controller display repair |
| PVD 4 |
Status: Up
|
Available for use. |
| PVD 5 |
Status: Up
|
Available for usage |
| PVD 6 |
Status: Up
|
Source 3 does not work. |
| PVD 7 |
Status: Up
|
|
| PVD 8 |
Status: Up
|
Available for use. |
| PVD 9 |
Status: Up
|
Available for use. |
| Rapid Thermal Annealer 1 |
Status: Down
|
Broken quartz part. Replacement on order. |
| Rapid Thermal Annealer 2 |
Status: Down
|
System shutdown. |
| Reflectometer |
Status: Up
|
Available for use. |
| RIE 1 |
Status: Up
|
Available for use. |
| RIE 2 |
Status: Up
|
Pump repair in progress. |
| Screen Printer |
Status: Up
|
Available for use. |
| SEM 1 - Helios |
Status: Up
|
Available |
| SEM 1 - Helios (FIB mode) |
Status: Up
|
Available for use. |
| SEM 2 - Nova NanoSEM |
Status: Up
|
Available |
| SEM 2 - Nova NanoSEM (mountable detector) |
Status: Up
|
Available |
| SEM 3 - Explorer |
Status: Up
|
Up |
| SEM 4 - DB235 |
Status: Down
|
4D LABS Support Ended |
| SEM 4 - DB235 (FIB mode) |
Status: Down
|
4D LABS Support Ended |
| SIMS |
Status: Up
|
Available |
| Small Angle X-ray Scattering System |
Status: Up
|
Available for use. Humidity stage installed. |
| Spin Coaters |
Status: Up
|
Available for use. |
| Spin-Rinse-Dryer |
Status: Up
|
Available for use. |
| Spray Coater |
Status: Up
|
Available for use. |
| Sputter System 1 - Ir/C |
Status: Up
|
|
| Sputter System 2 - Au |
Status: Down
|
4D LABS Support Ended |
| STEM 1 - Osiris |
Status: Up
|
|
| STEM 2 - Tecnai |
Status: Down
|
4D LABS Support Ended |
| STEM 3 - Hitachi |
Status: Down
|
4D LABS Support Ended |
| Stress Meter |
Status: Up
|
Available for use. |
| Technician-Characterization |
Status: Up
|
|
| Technician-Fabrication |
Status: Up
|
|
| Technician-Student |
Status: Up
|
|
| Training-Characterization |
Status: Up
|
|
| Training-Fabrication |
Status: Up
|
|
| Tube Furnace 1 - SiO2 |
Status: Up
|
Available for use. |
| Tube Furnace 2 - Doping |
Status: Up
|
Available for use. |
| Tube Furnace 3 - Si3N4/SiNx |
Status: Up
|
Available for use. |
| Tube Furnace 4 - poly-Si |
Status: Up
|
Available for use. |
| UV-Vis |
Status: Up
|
|
| Vacuum Oven 1 |
Status: Up
|
Available for use. |
| Vacuum Oven 2 |
Status: Up
|
Available for use. |
| Vitrobot |
Status: Up
|
Available for use. |
| Wafer Bonder |
Status: Up
|
Available for use. |
| Wafer CV Profiler |
Status: Up
|
Available for use. |
| Wafer Scriber |
Status: Up
|
Available for use. |
| Wet Lab |
Status: Up
|
Available for use. |
| Wet Lab 7000 Lvl |
Status: Up
|
Available for use. |
| Wetbench #1: Organics |
Status: Up
|
Available for use. |
| Wetbench #2: Acids |
Status: Up
|
Available for use. |
| Wetbench #3: Developers |
Status: Up
|
Available for use. |
| Wetbench #4: KOH/Metal Etch |
Status: Up
|
Available for use. |
| Wetbench #5: RCA Clean |
Status: Up
|
Available for use. |
| Wetbench #6: Electroplating |
Status: Up
|
Available for use. |
| Wetbench #7: Acid Cleaning |
Status: Up
|
Available for use. |
| Wetbench #8: General solvent |
Status: Up
|
Available for use. |
| Wetbench #9: Nanomaterials and Organics |
Status: Up
|
Available for use. |
| Wire Bonder |
Status: Up
|
Available for use. |
| XeF2 Etcher |
Status: Up
|
Available for use. |
| XPS, AES, ISS, SEM |
Status: Down
|
Available for use. |
| XRD 1 |
Status: Up
|
Available |
| XRD 2 |
Status: Up
|
Room temperature stage. B-B optics. Silicon strip detector. |