Simon Fraser University

Tools


Fabrication and Prototyping Tools

The Fabrication and Prototyping Facility has many tools for development of micro- and nanostructured materials and novel device designs. Many of these tools are located in our Class 100 Clean Room.


Lithography
Electron Beam Lithography Laser Writer Mask Aligner 1 Mask Aligner 2 Mask Writer Nanoimprinter
Film Deposition and Growth
Atomic Layer Deposition Glovebox Deposition System PECVD PVD 1 PVD 2 PVD 3
PVD 4 PVD 5 Screen Printer Spray Coater Tube Furnace 1 - SiO2 Tube Furnace 2 - Doping
Tube Furnace 3 - Si3N4 Tube Furnace 4 - poly-Si
Dry Etching
Plasma Stripper 1 Plasma Stripper 2 RIE 1 - Chlorine RIE 2 - Fluorine XeF2 Etcher
Sample Preparation and Processing
Critical Point Dryer Developer Station Dicing Saw High Temperature Furnace Hot Plates Laser Micromachining
Laser Scriber Rapid Thermal Annealer 1 Rapid Thermal Annealer 2 Spin Coaters Spin-Rinse-Dryer Vacuum Oven 1
Vacuum Oven 2 Wafer Scriber Wetbench 1 - Organics Wetbench 2 - Acids Wetbench 3 - Developers Wetbench 4 - KOH/Metal Etch
Wetbench 5 - RCA Clean Wetbench 6 - Electroplating Wetbench 7 - Acid Cleaning Wetbench 8 - General Solvent Wetbench 9 - Organic Cleaning Wet Lab
Wire Bonder
Characterization
4 Point Probe Meter Contact Angle Goniometer Ellipsometer 1 Microscope 1 Microscope 2 Probe Station - Clean Room
Probe Station - Glovebox Profilometer 1 Profilometer 2 Reflectometer Stress Meter Wafer CV Profiler

Materials and Device Characterization Tools

The Materials and Device Characterization Facility has many tools to provide detailed structural, compositional, and performance characteristics of various materials and devices.


Scanning Transmission Electron Microscopy
STEM 1 - FEI Tecnai G2 STEM 2 - Hitachi 8100 STEM 3 - FEI Tecnai Osiris
Dual Beam Scanning Electron Microscopy/Focused Ion Beam
SEM/FIB 1 - FEI DB235 SEM/FIB 2 - FEI Helios
Scanning Electron Microscopy/Helium Ion Microscopy
SEM 3 - Explorer SEM 4 - Nova NanoSEM HIM - Orion Nanofab
X-ray Crystal Structure and Surface Composition Analysis
SAXS XPS XRD 1 - Rigaku XRD 2 - Bruker
Materials and Device Testing
Atomic Force Microscope Ellipsometer 2 Fuel Cell Test Station 1 Fuel Cell Test Station 2
ICPMS (w/ Laser Ablation) Porosimeter
Sample Preparation
Epoxy Embedding System Grinder/Polisher Ion Miller Microtome
Plasma Cleaner Sputter System 1 - Ir/C Sputter System 2 - Au