Simon Fraser University

Laser Writer


- minimum feature size of 1 µm
- alignment accuracy of 500 nm
- 375 nm laser diode
- 50-level greyscale exposure
- patterns up to 30 x 30 mm2

Photos


Tool Status Up
Manufacturer Heidelberg
Model uPG 101
Typical Application Direct laser lithography
Location 6060.9
Related Documents
Contact Information

Training

Mohamad Rezaei rezaei@4dlabs.ca