Simon Fraser University

SEM 3 - Explorer


The Explorer is a scanning electron microscope that is designed for the imaging and elemental analysis of a wide spectrum of surfaces and particulates. This system is equipped with:

  • Imaging resolution of ~20 nm
  • Secondary-electron detector
  • Backscattered electron detector
  • Variable Pressure of 0.01-1.0 Torr
  • Acceleration Voltage of 0.2-25 kV
  • OmegaMax EDS Detector with a resolution of 133 eV
  • Stage motion up to 75 x 95 mm
  • Chamber size of 170 x 220 x 50 mm (x, y, z)

 


Tool Status Up
Manufacturer FEI/Aspex
Model Explorer
Typical Application Imaging and elemental analysis
Location 7130
Related Documents
Contact Information

Training

Xin Zhang zhang@4dlabs.ca