Spin Coaters
- programmable spin speeds, temperatures, and ramp rates
- edge bead removal available
- aluminum hot plate surface for uniform heating
- dedicated spin coaters and hot plates for PMMA and MiR 703
- spin speeds up to 6000 rpm
- processing for small pieces, 50 and 100 mm wafers
| Tool Status | Up | ||
|---|---|---|---|
| Location | 6060.7 | ||
| Related Documents | |||
| Contact Information |
Training
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