XPS, AES, ISS, SEM
- XPS: X-ray Photoelectron Spectroscopy
angle-resolved XPS
ion etching for surface cleaning and depth profiling with XPS
- XPM: X-ray Photoelectron Microscopy
- AES: Auger Electron Spectrometry
- SAM: Scanning Auger Microscopy
- SEM: Scanning Electron Microscopy
- ISS: Ion Scattering Spectroscopy
- SIMS: Secondary Ion Mass Spectrometry
- heating and cooling stage (-160 – 600 °C)
| Tool Status | Up | ||
|---|---|---|---|
| Manufacturer | Kratos Analytical | ||
| Model | Axis Ultra DLD | ||
| Typical Application | Advanced surface analysis | ||
| Location | 6140 | ||
| Related Documents | |||
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